Active Vibration Control - AVI Series

AVI-200M Active Vibration Isolation Platform with Aluminum Top Plate

Easy to Use, Easy to Install and Easy to Achieve Amazing Results! The AVI Series frequently pushes the resolution boundaries for numerous microscopes, making understanding measured data more clear and concise. The AVI Series is a low profile, modular, active vibration isolation system capable of achieving sub-herz vibration isolation across all six degrees of freedom. The AVI Series is the right solution for any instrument, with models capable of supporting up to 9,000 lbs!

 

STANDARD FEATURES

SELECTION GUIDE

PERFORMANCE

AVI-200 SYSTEM

AVI-400 SYSTEM

AVI-600 SYSTEM

LFS SYSTEM UPGRADE

 


 

STANDARD AVI FEATURES
 
  • Isolates in six possible rotational and translational modes of vibration.

  • Active Isolation from 1 Hz to 200 Hz. Passive Isolation beyond 200 Hz

  • No low frequency resonance means much better performance than a passive system.

  • 500 times stiffer than passive system

  • Inherent stiffness imparts excellent directional and positional stability

  • Module length can be adjusted for specific applications

  • Module style allows system to adapt to specific sizes and loads, making it ideal for a wide range of applications

 

 

SELECTION GUIDE

To determine which AVI Series platform is right for your instrument or application, please review the load capacity of each two module platform and make sure it exceeds the listed weight of your instrument or application.

AVI platforms will often include a top mounting plate to help distribute the weight of the instrument across the AVI modules and provide a firm coupling between the modules and the instrument.

 

Quick Application Overview:

  • The AVI-200 Series is commonly used with Atomic Force Microscopes (AFMs) and Scanning Probe Microscopes (SPMs)

 

  • The AVI-400 Series is commonly used with Scanning Electron Microscopes (SEMs) and Transmission Electron Microscopes (TEMs)

 

  • The AVI-600 Series is commonly used with large Transmission Electron Microscopes (TEMs) and  Fabry-Perot Interferometers.

 

If you have any questions about what AVI Series platform is right for your instrument, contact us today!

 


 

PERFORMANCE

AVI Series Active Vibration Isolation Performance Graph

The performance graph listed above is to be considered for all AVI Series platforms. The transmissibility graph is a conservative estimate of performance in any given lab environment and pertains to all six translational and rotational modes of vibration (all six degrees of freedom).

 

Performance Details*:

  • Active Vibration Isolation from 1 - 200 Hz

  • Passive Vibration Isolation from 200 Hz and Beyond

  • 90% Vibration Attenuation at 5.5 Hz

  • 99% Vibration Attenuation at 10 Hz and beyond

  • Low frequency performance can be improved with the LFS System Upgrade

 

Imaging from SEM - Active Vibration Isolation Disabled (Off)Imaging from SEM - Active Vibration Isolation Disabled (Off) Imaging from SEM - Active Vibration Isolation Enabled (On)Imaging from SEM - Active Vibration Isolation Enabled (On)

Images provided above are of a defect in a carbon sticky tab coated with 7 nm of Pt. - Courtesy of the Salk Institute - Utilizing an AVI-400 Plus Platform with a Carl Zeiss Sigma VP SEM

 


  

AVI-2001

   

AAActive Vibration Isolation

 

AVI-200 Active Vibration Isolation Platform

Push Your AFM to Its Limits! The AVI-200 consistently provides research universities and instrument manufacturers with the highest resolution images possible for their AFM, SPM and other various instruments. The AVI-200 is established as the ideal solution for numerous instrument manufacturers who have customers experiencing extremely noisy environments.

 

 

APPLICATIONS - AVI-200

The AVI-200 supplies makers and users of SPMs with optimal vibration isolation solutions throughout numerous noisy environments. The modular, non-intrusive design of the AVI-200 allows for versatility and general applicability to a myriad of instruments requiring high performance vibration isolation.

 

Common Applications for an AVI-200 System Include:

 

  • STM

  • AFM

  • Tribology

  • Spinstand Systems

  • Interferometry

  • Profilometry

  • Other Various High-Precision Research Instruments

 

 

AVI-200 MODELS  

AVI-200 Active Vibration Isolation Platform Models

 

The standard AVI-200 platform includes two modules and one controller, making the total load capacity double what is listed above for each model (i.e. total load capacity for an AVI-200M platform: 300 Kg / 660 Lbs). A common accessory for the AVI-200 platforms is the use of a top mounting plate for an even distribution of load across the AVI modules.

 

The AVI Series is a modular, scalable platform that may utilize multiple AVI modules in any particular configuration. Herzan encourages customers who are interested in the AVI Series to verify whether their instrument or application meets the model's listed load capacity and dimensions. If it does not, a larger AVI platform may be suggested or the utilization of multiple AVI modules (3+).  

 1 Previously the AVI-350


 

AVI-400

 

Active Vibration Isolation

 

AVI-400 Active Vibration Isolation Platform

Bring Your SEM Into Spec! The AVI-400 active vibration isolation system frequently brings SEMs in even the noisiest of environments within vibration specification. Manufacturers such as Carl Zeiss, FEI and numerous others have chosen Herzan's solution to provide their customers with the highest performing vibration isolation systems for their microscopes.

  

 

APPLICATIONS - AVI-400

The AVI-400 has supplied makers and users of SEMs, TEMs and other delicate instruments with optimal vibration isolation solutions throughout numerous noisy environments. The modular, easy to install design of the AVI-400 allows for versatility and general applicability to a myriad of instruments requiring high performance vibration isolation.

Carl Zeiss Sigma VP SEM Supported By AVI-400 Platform

 

 Common Applications for an AVI-400 System Include:  

 

  • STM

  • SEM

  • TEM

  • UHV-SPM

  • UHV-STM

  • Lithography

  • Spectrometry

  • High-Precision Metrology 

  

Carl Zeiss Sigma VP SEM Supported by AVI-400 Plus Platform

 

 

 AVI-400 MODELS

AVI-400 Active Vibration Isolation Models

 

The standard AVI-400 platform includes two modules and one controller, making the total load capacity double what is listed above for each model (i.e. total load capacity for an AVI-400 platform: 600 Kg / 1,320 Lbs). A common accessory for the AVI-400 platforms is the use of a top and bottom mounting plate. The top mounting plate helps ensure a more even load distribution across the AVI modules, whereas the bottom mounting plate helps meet the floor flatness specification of the AVI-400 modules (i.e. 2 millimeters per meter).

 

The AVI Series is a modular, scalable platform that may utilize multiple AVI modules in any particular configuration. Herzan encourages customers who are interested in the AVI Series to verify whether their instrument or application meets the model's listed load capacity and dimensions. If it does not, a larger AVI platform may be suggested or the utilization of multiple AVI modules (3+).

 




  

AVI-600

 

Active Vibration Isolation

 

AVI-600M Active Vibration Isolation Platform

The Highest Vibration Isolation Performance for the Highest Load Instruments. AVI-600 is an adaptable system ideal for supporting delicate Transmission Electron Microscopes, Fabry-Perot Interferometers, Ultra High Vacuum Systems and tunnel-microscopes, allowing the ultimate performance to be achieved from these and other high resolution instruments.

 

 

  AVI-600 MODELS

AVI-600 Active Vibration Isolation Platform Models

 

The standard AVI-600 platform includes two modules and one controller, making the total load capacity double what is listed above for each model (i.e. total load capacity for an AVI-600 platform: 900 Kg / 1,980 Lbs). A common accessory for the AVI-600 platforms is the use of a top and bottom mounting plate. The top mounting plate helps ensure a more even load distribution across the AVI modules, whereas the bottom mounting plate helps meet the floor flatness specification of the AVI-600 modules (i.e. 2 millimeters per meter).

 

The AVI Series is a modular, scalable platform that may utilize multiple AVI modules in any particular configuration. Herzan encourages customers who are interested in the AVI Series to verify whether their instrument or application meets the model's listed load capacity and dimensions. If it does not, a larger AVI platform may be suggested or the utilization of multiple AVI modules (3+).

 


 

 

AVI SERIES TECHNICAL SPECIFICATIONS

 

 

 


 

 

LFS SYSTEM UPGRADE                     Download LFS System Data Sheet

 LFS System Low Frequency Vibration Isolation Stabilizer

 

 

 

 

 

 

 

 

The LFS System is Herzan's latest upgrade feature for the AVI Series platforms, vastly improving the low frequency vibration isolation performance of an already industry-leading platform. 

 

The LFS System enables AVI Series platforms to isolate vibrations at 0.5 Hz, marking a significant improvement in the sub-herz frequency bandwidth. The LFS System is versatile in its applicability and compatible with all AVI-200, AVI-400, and AVI-600 LP Series platforms.

 

 

STANDARD LFS FEATURES

  • Utilizes complementary feedforward arrangement of high sensitivity sensors
  • Focuses on isolating low frequency vibrations
  • Retrofittable for existing AVI Platforms / Upgradeable for new AVI platforms
  • Easy to install with no additional complexity added to the AVI Series platforms
  • Compatible with: AVI-200, 400, and 600 LP Systems
 
LFS System Configuration Panel

 

 


 

 

TECHNOLOGY

The LFS System utilizes a complementary feedforward arrangement of sensors, specifically focusing on isolating the lower frequency bandwidth of vibrations. The technology behind the LFS System is an advance configuration of high sensitivity sensors measuring low frequency vibrations along the two horizontal axes. The environmental information gathered by the sensors feed into an AVI platform controller, sending signals to the piezo electric actuators to cancel out low frequency vibrations. 

 

In addition to achieving sub-herz vibration isolation, the LFS System maintains a high level of stability and consistency by removing the effects of temperature fluctuations on the sensors' measurement capabilities. Each LFS System incorporates a stability feature to maintain reliable performance of the LFS System over long measurement periods.

 Low Frequency Vibration Stabilizer Front Panel

PERFORMANCE

The LFS System enhances the low-frequency vibration isolation performance of the AVI Series, enabling the line of platforms to begin isolation at 0.5 Hz. Below is a performance comparison graph depicting the standard performance of the AVI Series platforms and the AVI Series platforms with the LFS System.

LFS System Low Frequency Vibration Isolation Performance Graph

  • Enhances vibration isolation from 0.5 - 100 Hz
  • 90% reduction past 2 Hz
  • 99% reduction past 5 Hz
  • Up to 50 dB of vibration reduction
  • Isolates vibrations in the two horizontal axes